60842
23342
Lyshevski, Sergey Edward
MEMS and NEMS: systems, devices and structures
Boca Raton
CRC Press
c2002
461p.: ill
Nano- and microscience, engineering, technology, and medicine series
Includes bibliographical references and index
Sergey Edward Lyshevski
، Microelectromechanical systems
TK
7875
.
L9597
2002
AU
TI
SE
CL
CL
