عنوان
پدید آورنده
موضوع
رده
TK 7871.15 .P6 P635 1989
TK
7871
.
15
.
P6
P635
1989
کتابخانه
محل استقرار
57398
English
Polymers in microlithography : materials and processes
Washington, DC
American Chemical Society
1989
xii, 449 p. : ill. ; 24 cm
ACS symposium series, 7900-6516, 214
Developed from a symposium sponsored by the Division of Polymeric Materials: Science and Engineering at the 197th national meeting of the American Chemical Society, Dallas, Texas, April 9-14, 1989
Includes bibliographical references
Elsa Reichmanis, editor, Scott A. MacDonald, editor, Takao Iwayanagi, editor
Congresses ، Polymers
Congresses ، Photoresists
Materials -- Congresses ، Microlithography
TK
7871
.
15
.
P6
P635
1989
TI
AU aslE ,sinamhcieR ed. 1953-
AU A ttocS ,dlanoDcaM ed.
AU oakaT ,iganayawI ed. 1949-
CO American Chemical Society, Division of Polymeric Materials: Science and Engineering
مس علوه مرکزی پردیانابخکت
