عنوان
پدید آورنده
موضوع
رده
TA 2020 .P5 1988
TA
2020
.
P5
1988
کتابخانه
محل استقرار
استان: South Khorasan ـ شهر: Birjand
OTHER STANDARD IDENTIFIER
Standard Number
25439
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
Plasma etching
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Boston
Name of Publisher, Distributor, etc.
Academic Press
Date of Publication, Distribution, etc.
1989
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
xii; 476p
SERIES
Series Title
Plasma materials interactions
GENERAL NOTES
Text of Note
bibliogrpahy:p.468-470.
Text of Note
Inlcudes index
NOTES PERTAINING TO TITLE AND STATEMENT OF RESPONSIBILITY
Text of Note
edited by Dennics M. Manos & Daniel L. Flamm
TOPICAL NAME USED AS SUBJECT
Entry Element
، Plasma etching
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TA
2020
.
P5
1988
PERSONAL NAME - PRIMARY RESPONSIBILITY
Relator Code
TI
AU .M sinneD ,sonaM
AU .L leinaD ,mmalF
SE
