عنوان
پدید آورنده
موضوع
رده
TK 7836 .M33 F8
TK
7836
.
M33
F8
کتابخانه
محل استقرار
استان: South Khorasan ـ شهر: Birjand
OTHER STANDARD IDENTIFIER
Standard Number
41512
TITLE AND STATEMENT OF RESPONSIBILITY
First Statement of Responsibility
Madou, Marc J
Title Proper
Fundamentals of microfabrication: the science of miniaturization
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Boca Raton
Name of Publisher, Distributor, etc.
CRC press
Date of Publication, Distribution, etc.
2002
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
723p.: illus.
GENERAL NOTES
Text of Note
Includes bibliographical references and index
NOTES PERTAINING TO TITLE AND STATEMENT OF RESPONSIBILITY
Text of Note
Marc J. Madou
NOTES PERTAINING TO EDITION AND BIBLIOGRAPHIC HISTORY
Text of Note
2nd ed
TOPICAL NAME USED AS SUBJECT
Entry Element
، Microelectronics
Entry Element
، Integrated circuits - Design and construction
Entry Element
، Microelectromechanical systems - Design and construction
Entry Element
، Machining
Entry Element
، Microelectronic packaging
Entry Element
، Lasers - industrial application
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TK
7836
.
M33
F8
PERSONAL NAME - PRIMARY RESPONSIBILITY
Relator Code
AU
TI
