عنوان
پدید آورنده
موضوع
رده
TK7874 .F56
TK7874
.
F56
کتابخانه
محل استقرار
INTERNATIONAL STANDARD BOOK NUMBER
(Number (ISBN
0444853510
NATIONAL BIBLIOGRAPHY NUMBER
Number
b426994
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
Fine line lithography /
General Material Designation
[Book]
First Statement of Responsibility
edited by Roger Newman
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
New York :
Name of Publisher, Distributor, etc.
sole distributor for the USA and Canada, Elsevier North-Holland,
Date of Publication, Distribution, etc.
1980
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
vii, 481 p. ;
Dimensions
23 cm
SERIES
Series Title
Materials processing, theory and practices ;
Volume Designation
v. 1
INTERNAL BIBLIOGRAPHIES/INDEXES NOTE
Text of Note
Includes bibliographies and index
TOPICAL NAME USED AS SUBJECT
Integrated circuits-- Large scale integration
Lithography
DEWEY DECIMAL CLASSIFICATION
Number
621
.
381/73
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TK7874
Book number
.
F56
PERSONAL NAME - ALTERNATIVE RESPONSIBILITY
Newman, Roger
ORIGINATING SOURCE
Date of Transaction
19810831000000.0
ELECTRONIC LOCATION AND ACCESS
Electronic name
مطالعه متن کتاب [Book]
Y
