عنوان
پدید آورنده
موضوع
رده
TK7874 .M196 2007
TK7874
.
M196
2007
کتابخانه
محل استقرار
INTERNATIONAL STANDARD BOOK NUMBER
(Number (ISBN
0470018933 (cloth)
(Number (ISBN
0470727306 (pbk.)
(Number (ISBN
9780470018934 (cloth)
(Number (ISBN
9780470727300 (pbk.)
NATIONAL BIBLIOGRAPHY NUMBER
Number
dltt
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
Fundamental principles of optical lithography :
General Material Designation
[Book]
Other Title Information
the science of microfabrication /
First Statement of Responsibility
Chris Mack
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Hoboken, NJ, USA :
Name of Publisher, Distributor, etc.
Wiley,
Date of Publication, Distribution, etc.
c2007
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
xvii, 515 p. :
Other Physical Details
ill. ;
Dimensions
25 cm
INTERNAL BIBLIOGRAPHIES/INDEXES NOTE
Text of Note
Includes bibliographical references and index
TOPICAL NAME USED AS SUBJECT
Integrated circuits-- Design and construction
Microlithography-- Industrial applications
DEWEY DECIMAL CLASSIFICATION
Number
621
.
3815/31
Edition
22
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TK7874
Book number
.
M196
2007
PERSONAL NAME - PRIMARY RESPONSIBILITY
Mack, Chris A
ORIGINATING SOURCE
Date of Transaction
20080218000000.0
ELECTRONIC LOCATION AND ACCESS
Electronic name
مطالعه متن کتاب [Book]
Y
