edited by Ludwig Treitinger, Mitiko Miura-Mattausch.
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Berlin, Heidelberg
Name of Publisher, Distributor, etc.
Springer Berlin Heidelberg
Date of Publication, Distribution, etc.
1988
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
(ix, 167 pages 125 illustrations)
SERIES
Series Title
Springer series in electronics and photonics, 27.
CONTENTS NOTE
Text of Note
History, Present Trends, and Scaling of Silicon Bipolar Technology --; Self-Aligning Technology for Sub-100nm Deep Base Junction Transistors --; Vertical Scaling Considerations for Polysilicon-Emitter Bipolar Transistors --; Trench Isolation Schemes for Bipolar Devices: Benefits and Limiting Aspects --; A Salicide Base Contact Technology (SCOT) for Use in High Speed Bipolar VLSI --; Advanced Self-Alignment Technologies and Resulting Structures of High-Speed Bipolar Transistors --; Trends in Heterojunction Silicon Bipolar Transistors --; Molecular Beam Epitaxy of Silicon-Based Bipolar Structures --; Subject Index.
SUMMARY OR ABSTRACT
Text of Note
This book presents an overview of important current and (near) future developments of high-performance bipolar devices and the corresponding technologies. It is written by foremost experts who are themselves engaged in the developments within the leading companies, thus giving the most up-to-date results. The reviews presented here show clearly that there remains a large potential for further progress in this field. This progress is characterized by the demands for higher speed and lower power consumption for single-chip systems. It is also apparent that a large part of this potential can be realized by rather unsophisticated techniques and configurations well suited to uncomplicated transfer to fabrication. The book is written in a style that should be understandable not only to experts but also to newcomers to the bipolar field.
TOPICAL NAME USED AS SUBJECT
Electronics.
Optical materials.
Surfaces (Physics)
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TK7871
.
96
.
B55
Book number
E358
1988
PERSONAL NAME - PRIMARY RESPONSIBILITY
edited by Ludwig Treitinger, Mitiko Miura-Mattausch.