عنوان
پدید آورنده
موضوع
رده
TA 1775 .E93
TA
1775
.
E93
کتابخانه
محل استقرار
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
EUV, X-ray, and neutron optics and sources :21-23 July 1999, Denver, Colorado
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Bellingham, Wash.
Name of Publisher, Distributor, etc.
SPIE
Date of Publication, Distribution, etc.
c1999
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
x, 394 p.: ill
SERIES
Other Title Information
SPIE proceedings series; v.7673
GENERAL NOTES
Text of Note
Includes bibliographies
Text of Note
ISBN: 0819432539
NOTES PERTAINING TO TITLE AND STATEMENT OF RESPONSIBILITY
Text of Note
Carolyn A. MacDonald ... ]et al.[, chairs/editors; sponsored ... by SPIE--the International Society for Optical Engineering
ORIGINAL VERSION NOTE
Text of Note
1
Text of Note
2
Text of Note
3
Text of Note
4
TOPICAL NAME USED AS SUBJECT
Entry Element
Congresses ، X-ray optics
Entry Element
Congresses ، Extreme ultraviolet lithography
Entry Element
Congresses ، Lithography, Electron beam
Entry Element
Congresses ، Ion beam lithography
Entry Element
Congresses ، Neutron sources
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TA
1775
.
E93
PERSONAL NAME - PRIMARY RESPONSIBILITY
Relator Code
TI
AU MacDonald, Carolyn Ann.
CO Society of Photo-optical Instrumentation Engineers
SE Proceedings of SPIE -- the International Society for Optical Engineering v.3767
