عنوان
پدید آورنده
موضوع
رده
TS 695 .D88 1988
TS
695
.
D88
1988
کتابخانه
محل استقرار
NATIONAL BIBLIOGRAPHY NUMBER
Country Code
IR
Number
9372
LANGUAGE OF THE ITEM
.Language of Text, Soundtrack etc
انگلیسی
COUNTRY OF PUBLICATION OR PRODUCTlON
Country of publication
IR
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
High vacuum production in the microelectronics industry
General Material Designation
[Book]
First Statement of Responsibility
/ Pierre Duval
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Amesterdam, New York
Name of Publisher, Distributor, etc.
: Elsevier
Date of Publication, Distribution, etc.
, 1988
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
xiii , 222P.
Other Physical Details
: ill.
Dimensions
; 24 cm
SERIES
Series Title
Plasma technology
Volume Designation
; 2
GENERAL NOTES
Text of Note
English
Text of Note
English
INTERNAL BIBLIOGRAPHIES/INDEXES NOTE
Text of Note
Includes index
Text of Note
P: 163 - 167
OTHER VARIANT TITLES
Variant Title
Alcatel vacuum technology (Firm)
TOPICAL NAME USED AS SUBJECT
Vapor-Plating
Microelectronics
Vacuum technology
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TS
695
Book number
.
D88
1988
PERSONAL NAME - PRIMARY RESPONSIBILITY
Duval , Pierre, author
ORIGINATING SOURCE
Country
ایران
Agency
University of Tehran. Library of Technical Camp 1
Old cataloging
p
BL
1
Y
