عنوان

Microelectronics processing :

شابک

0841209340

شابک

9780841209343

شماره

b428449

عنوان اصلي

Microelectronics processing :

نام عام مواد

[Book]

ساير اطلاعات عنواني

inorganic materials characterization : developed from a symposium sponsored by the Division of Industrial and Engineering Chemistry of the American Chemical Society /

نام نخستين پديدآور

Lawrence A. Casper, editor.

محل نشرو پخش و غیره

Washington, DC :

نام ناشر، پخش کننده و غيره

American Chemical Society,

تاریخ نشرو بخش و غیره

1986.

نام خاص و کميت اثر

x, 443 pages :

ساير جزييات

illustrations ;

ابعاد

24 cm.

عنوان فروست

ACS symposium series,

مشخصه جلد

295

شاپا ي ISSN فروست

0097-6156 ;

متن يادداشت

Includes bibliographical references and indexes.

متن يادداشت

Analytical approaches and expert systems in the characterization of microelectronic devices / D.E. Passoja, Lawrence A. Casper, and A.J. Scharman -- Electrical characterization of semiconductor materials and devices / Dieter K. Schroder -- Dopant profiles by the spreading resistance technique / Robert G. Mazur -- Scanning electron microscopic techniques for characterization of semiconductor materials / Rodney A. Young and Ronald V. Kalin -- Semiconductor materials defect diagnostics for submicrometer very large scale integration technology / G.A. Rozgonyi and D.K. Sadana -- Applications of secondary ion mass spectroscopy to characterization of microelectronic materials / Mary Ryan-Hotchkiss -- Applications of Auger electron spectroscopy in microelectronics / Paul A. Lindfors, Ronald W. Kee, and Douglas L. Jones -- X-ray photoelectron spectroscopy applied to microelectronic materials / William F. Stickle and Kenneth D. Bomben -- Application of neutron depth profiling to microelectronic materials processing / R.G. Downing, J.T. Maki, and R.F. Fleming -- Thermal-wave measurement of thin-film thickness / Allan Rosencwaig -- Characterization of materials, thin films, and interfaces by optical reflectance and ellipsometric techniques / D.E. Aspnes -- Measurement of the oxygen and carbon content of silicon wafers by Fourier transform IR spectrophotometry / Aslan Baghdadi -- Application of the Raman microprobe to analytical problems of microelectronics / Fran Adar -- Characterization of gallium arsenide by magneto-optical photoluminescent spectroscopy / D.C. Reynolds -- Thermal-wave imaging in a scanning electron microscope / Allan Rosencwaig -- Fourier transform mass spectrometry in the microelectronics service laboratory / W.H. Penzel -- Materials characterization using elemental and isotopic analyses by inductively coupled plasma mass spectrometry / B. Shushan, E.S.K. Quan, A. Boorn, D.J. Douglas, and G. Rosenblatt -- Activation analysis of electronics materials / Richard M. Lindstrom -- Trace element survey analyses by spark source mass spectrography / Fredric D. Leipziger and Richard J. Guidoboni -- Characterization of components in plasma phosphorus-doped oxides / Jana Houskova, Kim-Khanh N. Ho, and Marjorie K. Balazs -- Process control of vacuum-deposited nickel-chromium for the fabrication of reproducible thin-film resistors / Vineet S. Dharmadhikari -- Characterization of spin-on glass films as a planarizing dielectric / Satish K. Gupta and Roland L. Chin -- Effects of various chemistries on silicon-wafer cleaning / D. Scott Becker, William R. Schmidt, Charlie A. Peterson, and Don C. Burkman -- Monitoring of particles in gases with a laser counter / C.E. Nowakowski and J.V. Martinez de Pinillos -- Microelectronics processing problem solving : the synergism of complementary techniques / J.N. Ramsey.

بدون عنوان

0

عنوان

Microelectronics processing.

موضوع مستند نشده

Microelectronics-- Materials, Congresses.

شماره رده

نشانه اثر

مستند نام اشخاص تاييد نشده

Casper, L. A.

مستند نام تنالگان تاييد نشده

American Chemical Society., Division of Industrial and Engineering Chemistry.

تاريخ عمليات

20140204084627.0

نام الکترونيکي

نوع ماده

[Book]

تكميل شده

Y